Operating procedures of Zygo laser interferometer

Interferometer on, off and basic measurement steps
Boot Sequence
1. Turn on the computer and monitor
Input: user name: Zygo
Password: None
Log in to the operating system
2. Turn on the power supply of the interferometer host and preheat it for 15 ~ 20 minutes to make the interferometer host work stably
3. Double click the metropro icon on the computer desktop to enter the metropro measurement software.
Turn on the power switch and the indicator light is on
Basic measurement steps
1. Click the corresponding measurement application icon with the left mouse button to open the test application.
For example, open gpi.app
2. Build the test optical path (including standard mirror and sample), adjust the interference fringes, and refer to the specific measurement method later
Law. Set the necessary measurement parameters in metropro software, refer to the metropro software manual.
3. Click the measure button in the software or press the F1 key on the keyboard to complete the measurement and display the results.
4. Save the test report. Click the "Zygo" mark with the left mouse button to print or save the window picture.
5. Click the save data button in the software to save the test data.
Shutdown procedure
1. Close metropro software
Click the X button in the upper right corner of metropro to pop up a dialog box and click Yes to close metropro software
2. Turn off the interferometer host
Turn off the power switch of the host, and the indicator light goes out.
3. Turn off the computer and monitor
Installation of transmission elements
Warning!
In the following steps, it is not allowed to touch the transmission element by hand. Fingerprints can permanently damage the optics
Coating and optical surface.
1. Grasp the metal edge of the transmission element and take it out of the protective packaging box.
2. Align the two metal pins on the edge of the transmission element with the two corresponding chutes on the main adjusting frame.
Warning!
When the system is installed in vertical configuration, do not let go before locking the transmission element according to the following steps.
3. Gently clip the transmission element into the adjusting frame of the main engine, and hold the metal edge of the group element with your hand. Lock the black button
Rotate in a clockwise direction, which will hold the assembly to the adjusting bracket.
Note: when the assembly needs to be removed from the adjusting frame, hold the assembly by hand from the metal frame of the assembly
Loosen the fastening screw anticlockwise on one side.
Calibration of transmission elements
Before you use the interferometer for measurement, you must keep the transmission element aligned with the interferometer, and then make the measurement sample
The product is aligned with the transmission element. How to calibrate transmission elements will be described below. For calibration measurement samples, please refer to "measurement"
Two sections "measuring the surface shape quality" and "measuring the transmission wave surface quality".
1. Make sure the light bar switch is on( Push in position)
2. Press the align / View button on the remote control. Calibrated target crosshairs and one or more highlights will be displayed
It's on the monitor. The brightest point represents the light reflection of the outermost surface of the transmission element.
Measurement of surface profile quality
The measured sample is calibrated with the transmission element. After the sample is calibrated, the measurement is just to press a measure key in the metropro software. Whether the interferometer is placed vertically or horizontally, it is generally believed that the measurement cavity (or sample) should be made
The shorter the distance to the standard mirror, the better. This will minimize the distortion of air flow to the measuring wavefront.
Install the transmission flat (TF): put two metal pins on the lens into the TF
Hold the metal frame of the lens and rotate the lens clockwise, then tighten the side screw
Side locking knob.
2. Adjust the standard lens: press the align / View button of the remote control to switch the display screen to align state, and the cross wire image will appear in the plane. Adjust the two knobs on the adjusting frame of the interferometer host until the brightest light spot on the screen is in the center of the cross wire.
3. Put the tested sample on the measuring and adjusting frame: adjust the tilt knob of the adjusting frame until the bright spot of the tested sample on the screen is also in the center of the cross wire, which coincides with the reflected light spot of the lens.
4. Press the align / View button of the remote control again to switch the display screen to the "view" state, and the interference fringes should be displayed on the screen. Press zoom button to zoom so that the image of the surface you want to measure fills the screen as much as possible.
5. A piece of paper or other markers can be placed as close as possible to the tested object, which will provide an obvious edge for correction and focusing. Press the focus button of the remote control to make the image edge clear, and focus to make the image edge clear.
6. Adjust the tilt adjustment knob of the sample adjusting frame carefully to zero the fringes (to minimize the interference fringes).
8. Press measure key of Metro pro or F1 key on keyboard to measure.
Maintenance of interferometer host
Safety precautions for instrument use
1. Do not touch the main engine or anti vibration platform during the measurement.
2. In order to reduce the risk of electric shock as much as possible, the instrument must be well grounded through the power output.
3. Read the laser safety instructions in the interferometer manual.
4. Don't move the main engine at will. If it is necessary to move, please use the two special handles designed above the instrument
Move carefully, do not use your hands to directly touch piezoelectric ceramics and use force to move, piezoelectric ceramics belong to high precision
It is easy to be damaged by force, so it is necessary to avoid external force acting on it at any time. As shown in the figure:
Maintenance of main engine
The host is actually maintenance free, however, operating the instrument in a relatively clean environment
It's very important. If you need to clean the host case, please follow the steps below.
1. Use a furniture cleaner with moderate pH value, dip a piece of soft cloth in a small amount of cleaner, and wipe off the side and front of the host
Fingerprints and dust on the panel.
2. Use a dry cloth to clean the dust on the components. Do not use detergents or sprays near optical devices.
Lenses are coated optical parts, and clean sprays may damage their surfaces. For cleaning lens system, refer to
The section "cleaning optics" in the next chapter.
Maintenance of computer components
For maintenance, please refer to the manufacturer's relevant maintenance documents. The maintenance components include computer, color display and mouse
Label, keyboard and printer (if installed).
If you have a problem and are not sure where the fault is, please contact Zygo.
Maintenance and cleaning of optical components
Maintenance of optical components
After the measurement, the lens and other optical components should be carefully removed and stored without using the interferometer for a long time
It is stored in the special lens box.
Cleaning optics
Cleaning any precision optical device may damage its surface. All lens surfaces that can be cleaned are coated
Yes. Unnecessary and incorrect cleaning can easily damage the coated device. We should handle the optics correctly
When not in use, put them back into the plastic packaging box and keep the environment clean to minimize cleaning
The number of times.
Don't try to clean the optics in the host, it will affect the performance of the system. Please contact Zygo if necessary
Department.
Recommended cleaning materials
Polyethylene experimental gloves
Wear gloves to prevent contamination of the device surface and to protect the skin from harmful and irritating chemicals
Substance.
Compressed gas with nozzle
It is used to blow off the dust and dirt on the surface of optical devices.
Mirror cleaning paper
Used to clean the surface of optics when necessary. The mirror cleaning paper should be specially used for wiping precision optical devices.
Cotton swab
It is used to clean the hard to reach surface. The swab should be made of wood, paper, cotton and other materials. Application of plastic rod in acetone
It will dissolve in water.
solvent
Use spectral grade isopropyl alcohol and methanol to clean the pollutants attached on the optical surface. Use neutral 1%
Concentration of liquid soap or optical cleaner, clean oily pollution.
Recommended cleaning procedures
Warning!
Care must be taken when using isopropyl alcohol and methanol, which are flammable and toxic. Do not reuse cleaning paper, reuse will cause dirt adhesion, damage optical components.
Before cleaning the optics, remove jewelry such as rings from fingers and wrists, wash hands carefully to remove skin grease, and wear gloves.
Contamination cleaning procedure
Dust or fine dirt 1. Use the nozzle to blow loose small dust or dirt. 2. If dust still exists, wrap two pieces of mirror cleaning paper or fold a piece of mirror cleaning paper on the wooden stick to make it just wider than the part to be cleaned.
3. Drop alcohol or methanol on the mirror cleaning paper.
4. Use it to wipe the lens once in one direction. If you still need to wipe, use a new wooden stick and mirror cleaning paper. Fingerprints, oil and water marks note: in this case, the surface must be cleaned immediately. Acid on the skin can damage the lens surface.
1. Use the nozzle to blow loose small dust or dirt.
2. If the dirt still exists, wrap two pieces of mirror cleaning paper or fold a piece of mirror cleaning paper on the wooden stick so that it is just wider than the part to be cleaned.
3. Drop 1% soap on the mirror paper.
4. Wipe the lens once from one direction. If you still need to wipe, use a new wooden stick and mirror cleaning paper.
5. Repeat 2 to 4 steps with mirror cleaning paper soaked in distilled water. In order to wipe off the residual liquid soap.
6. Soak the paper with methanol or ethanol and repeat 2 to 4 steps.